A highly sensitive and low-noise IR photosensor based on a-SiGe as a sensing and noise filter

The a-SiGe TFT photosensor for embedded touch-screen panels (TSPs) was characterized by comparison with an a-Si sensor.

The photoresponse of an a-SiGe sensor at a 850-nm wavelength was much higher than that of a-Si, indicating that a-SiGe is a strong candidate material for an IR sensor.

In order to increase the signal-to-noise ratio, the incident visible light was filtered by incorporating a bandpass-filter layer. An a-SiGe IR-sensor-embedded LCD panel was successfully demonstrated, showing an excellent multitouch property independent of ambient-light conditions. This technology can be widely used in multifunctional TSPs.

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