Miniature Mass Flow Sensor

Market demand for a miniature mass flow sensor for tight packaging applications such as pick & place equipment with multiple heads drove Omron to take its proven MEMS sensor technology and successfully repackage it into a smaller envelope. The resulting product, the D6F-03A3 is a unidirectional MEMS mass flow sensor in the desired compact, streamlined body.
The D6F-03 series operates on a supply voltage of 10.8 to 26.4VDC while consuming just 15mA maximum. Their output signal is analog, 1 to 5VDC with load resistance of 10k Ohms minimum. The case is composed of molded thermoplastic and aluminum alloy with a three-pin industry standard electrical connector.
There are many applications utilizing these devices including pick & place systems, leak detection, spectroscopy, mass flow controllers, test equipment, and fuel cells.
Engineering samples and a complete set of technical data are available by contacting Omron Electronic Components.